880-012537-101.A3 Lam Research Pcb edge detector junction board

Lam Research develops innovative solutions that help our customers build smaller,faster, more powerful, and more power-efficient electronic devices—the kind that are driving the proliferation of technology into our everyday lives.

OUR ROLE
To produce the tiny, complex chips used in products such as cell phones, computing devices, and entertainment gadgets, semiconductor manufacturers require highly sophisticated processes and equipment. Lam’s products play a key role in this, allowing chipmakers to build device features that are more than 1,000 times smaller than a grain of sand. In fact, nearly every leading-edge integrated circuit made today has been processed with Lam Research equipment.

OUR PRODUCTS
Lam’s market-leading products are used in several steps that are repeated multiple times

Transport temperature/humidity see Chapter VI.1
Storage temperature/
humidity/duration see Chapter VI.1
Supply voltage tolerances
power stage
aux. supply (Option -24V-)
3x43V AC
10%
min. 20V DC / max. 30V DC referred to -GND
Ambient temperature TAMB.
in operation
0 … +45°C under rated conditions
+45 … +55°C with derating 2.5%/°C (forced convection)
Humidity in operation 5 … 85 % rel. humidity, no condensation
Site altitude up to 1000m a.m.s.l. without restriction
1000 … 2500m a.m.s.l. with derating 1.5%/100m
Pollution level pollution level 2 according to EN60204/EN50178
Protection class IP 00

Mounting location / position in closed switchgear cabinet / normally vertical
Ventilation cont. current < 8A
and TAMB. < 45°C
cont. current
8A
or TAMB. > 45°C
self-ventilating with natural convection (we always recommend
forced convection at higher loads or in narrow spaces).
forced convection
ensure that the incoming air is dust-free and that there is an
adequate supply of cooling air to the cabinet.

There are many thousand 200 mm Lam Alliance® tools in the field today with many being in excess of 10 years old. Yet, they are still heavily utilized and Lam’s Reliant business continues to build both new and refurbished versions to support our customers. Lam’s customers can also upgrade older Alliance® tools with the advanced control system and software architecture of Lam’s 2300 platform. This Alliance® C upgrade also allows the tools to do things for which they weren’t
originally designed. Just by upgrading the control system architecture and the software, the Alliance C upgrade improves the timing and reproducibility on the tool. At one customer location, it resulted in a 46-percent standard deviation
improvement in chamber-to-chamber CD with the process capability index (CPK) going up from 2.3 to 4.5.

The Alliance C upgrade also supports the addition of other upgrades such as throughput optimization (TPO), automatic preventive maintenance (AutoPM) and wet cleaning optimization (WCO). Whenever the process mix changes or a tool is repurposed, TPO software algorithms analyze and optimize the setup to improve tool performance. AutoPM runs a script to automate a large number of manual events and systematically and reproducibly bring the tool back online, thereby freeing up engineering resources to work on other systems. The WCO feature is software-guided cleaning guide that can be tailored to specific tool sets and provided in the customer’s local language. At customer sites, it has reduced labor time and unscheduled cleans.

The prices of all products of Zhangzhou Fengyun may fluctuate at any time. The specific price is subject to the customer service quotation. Please confirm the model, product, price and other details with the customer service before placing the order. Second-hand and brand-new products are sold in the store. Please contact the customer service for details.

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